Invention Grant
US08134381B2 Connection board, probe card, and electronic device test apparatus comprising same
失效
连接板，探针卡和包括该连接板的电子设备测试装置
- Patent Title: Connection board, probe card, and electronic device test apparatus comprising same
- Patent Title (中): 连接板，探针卡和包括该连接板的电子设备测试装置
-
Application No.: US12532688Application Date: 2008-03-18
-
Publication No.: US08134381B2Publication Date: 2012-03-13
- Inventor: Yoshihiro Abe , Takaji Ishikawa , Noriaki Shimasaki , Shigeru Matsumura
- Applicant: Yoshihiro Abe , Takaji Ishikawa , Noriaki Shimasaki , Shigeru Matsumura
- Applicant Address: JP Tokyo
- Assignee: Advantest Corporation
- Current Assignee: Advantest Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2007-079194 20070326
- International Application: PCT/JP2008/054992 WO 20080318
- International Announcement: WO2008/123076 WO 20081016
- Main IPC: G01R31/00
- IPC: G01R31/00
Abstract:
A probe card is provided which includes: probe needles electrically contacting input/output terminals of an IC device formed on a semiconductor wafer W; a mount base on which the probe needles are mounted; a support column supporting the mount base, a circuit board having interconnect patterns electrically connected to the probe needles via bonding wires; and a base member and stiffener for reinforcing the probe card. The mount base and the circuit board are noncontact.
Public/Granted literature
- US20100102837A1 CONNECTION BOARD, PROBE CARD, AND ELECTRONIC DEVICE TEST APPARATUS COMPRISING SAME Public/Granted day:2010-04-29
Information query
