Invention Grant
- Patent Title: Illumination system of a microlithographic exposure apparatus
- Patent Title (中): 微光刻曝光设备的照明系统
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Application No.: US11660754Application Date: 2005-08-23
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Publication No.: US08134687B2Publication Date: 2012-03-13
- Inventor: Wolfgang Singer , Johannes Wangler , Rafael Egger , Wilhelm Ulrich
- Applicant: Wolfgang Singer , Johannes Wangler , Rafael Egger , Wilhelm Ulrich
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- International Application: PCT/EP2005/009093 WO 20050823
- International Announcement: WO2006/021419 WO 20060302
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/42

Abstract:
An illumination system of a microlithographic exposure apparatus has an optical axis and a beam transforming device. This device includes a first mirror with a first reflective surface having a shape that is defined by rotating a straight line, which is inclined with respect to the optical axis, around the optical axis. The device further includes a second mirror with a second reflective surface having a shape that is defined by rotating a curved line around the optical axis. At least one of the mirrors has a central aperture containing the optical axis. This device may form a zoom-collimator for an EUV illumination system that transforms a diverging light bundle into a collimated light bundle of variable shape and/or diameter.
Public/Granted literature
- US20080212327A1 Illumination System of a Microlithographic Exposure Apparatus Public/Granted day:2008-09-04
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