Invention Grant
US08134688B2 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method 有权
移动体驱动方法和移动体驱动系统,图案形成方法和装置,曝光方法和装置,装置制造方法和校准方法

  • Patent Title: Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
  • Patent Title (中): 移动体驱动方法和移动体驱动系统,图案形成方法和装置,曝光方法和装置,装置制造方法和校准方法
  • Application No.: US11896579
    Application Date: 2007-09-04
  • Publication No.: US08134688B2
    Publication Date: 2012-03-13
  • Inventor: Yuichi Shibazaki
  • Applicant: Yuichi Shibazaki
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Oliff & Berridge, PLC
  • Priority: JP2006-237692 20060901
  • Main IPC: G01B11/00
  • IPC: G01B11/00 G03B27/32 G03B27/42 G03B27/54 G03B27/74
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
Abstract:
A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage is driven in the XY plane, based on measurement results of the positional information and positional information (p1, q1), (p2, q2), and (p3, q3) in a surface parallel to the XY plane of a head (an encoder) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage using the encoder system which includes a plurality of heads.
Information query
Patent Agency Ranking
0/0