Invention Grant
- Patent Title: Dual stage positioning and switching system
- Patent Title (中): 双级定位和开关系统
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Application No.: US12444631Application Date: 2006-12-04
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Publication No.: US08134689B2Publication Date: 2012-03-13
- Inventor: Xiaoping Li , Yingsheng Li
- Applicant: Xiaoping Li , Yingsheng Li
- Applicant Address: CN Shanghai
- Assignee: Shanghai Micro Electronics Equipment Co., Ltd.
- Current Assignee: Shanghai Micro Electronics Equipment Co., Ltd.
- Current Assignee Address: CN Shanghai
- Agency: Rabin & Berdo, PC
- Priority: CN200610116453 20060922
- International Application: PCT/CN2006/003270 WO 20061204
- International Announcement: WO2008/037131 WO 20080403
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03B27/60

Abstract:
The present invention has disclosed a dual stage positioning and switching system, which comprises at least a base, a first object stage positioning unit disposed on the base for a first workstation, and a second object stage positioning unit for a second workstation. Each of the object stage positioning units comprises at least a supporting structure, an X-direction guide bar, a Y-direction guide bar, and a motion positioning detector, wherein, the supporting structure comprises an object stage, and an object stage connector moving relative to the object stage. The object stage positioning unit further comprises a driver connecting to the object stage connector and driving the connector to move along the X-direction guide bar. The X-direction guide bars are positioned on and movable along the Y-direction guide bars. The system further comprises an object stage connector for transitional use during the switching process, which is positioned at the center of the Y-direction guide bar located on one side of the base. The present system does not include a cable stage, so that the structure of the system is simplified.
Public/Granted literature
- US20100045961A1 DUAL STAGE POSITIONING AND SWITCHING SYSTEM Public/Granted day:2010-02-25
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