Invention Grant
- Patent Title: Optical displacement measuring instrument
- Patent Title (中): 光学位移测量仪
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Application No.: US12481040Application Date: 2009-06-09
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Publication No.: US08134718B2Publication Date: 2012-03-13
- Inventor: Yutaka Miki
- Applicant: Yutaka Miki
- Applicant Address: JP Kanagawa
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2008-155283 20080613
- Main IPC: G01B11/14
- IPC: G01B11/14

Abstract:
A first light detector and a second light detector, in each of which a plurality of light-receiving elements are arranged in an adjoining manner, are respectively provided anterior to an image-forming point of first reflected light and posterior to an image-forming point of second reflected light. A focal-point detecting circuit includes: maximum value selectors for selecting the maximum values from sums of light-receiving signals from adjoining light-receiving elements of the first light detector and the second light detector respectively; a total value operator for obtaining the total value of light-receiving signals from all the light-receiving elements of each of the first light detector and the second light detector; a light-detecting-signal operator for obtaining light-detecting signals by subtracting the maximum values from the total values; and an error-signal operational circuit for outputting a difference between the light-detecting signals to a servo circuit as a signal based on an amount of displacement between a focal point and a measuring face.
Public/Granted literature
- US20090310147A1 OPTICAL DISPLACEMENT MEASURING INSTRUMENT Public/Granted day:2009-12-17
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