Invention Grant
- Patent Title: Mirror device
- Patent Title (中): 镜像设备
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Application No.: US12657518Application Date: 2010-01-22
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Publication No.: US08134767B2Publication Date: 2012-03-13
- Inventor: Yoshihiro Maeda , Hirotoshi Ichikawa , Fusao Ishii
- Applicant: Yoshihiro Maeda , Hirotoshi Ichikawa , Fusao Ishii
- Applicant Address: JP JP
- Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee Address: JP JP
- Agent Bo-In Lin
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/00
Abstract:
A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.
Public/Granted literature
- US20100128335A1 Mirror device Public/Granted day:2010-05-27
Information query
