Invention Grant
US08135204B1 Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe
有权
计算机实现的方法,载体介质和用于创建用于选择检验配方的一个或多个参数的缺陷样品的系统
- Patent Title: Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe
- Patent Title (中): 计算机实现的方法,载体介质和用于创建用于选择检验配方的一个或多个参数的缺陷样品的系统
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Application No.: US11859342Application Date: 2007-09-21
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Publication No.: US08135204B1Publication Date: 2012-03-13
- Inventor: Chien-Huei (Adam) Chen , Barry Becker , Hong Chen , Michael Van Riet , Chris Maher , Stephanie Chen , Suryanarayana Tummala , Yong Zhang
- Applicant: Chien-Huei (Adam) Chen , Barry Becker , Hong Chen , Michael Van Riet , Chris Maher , Stephanie Chen , Suryanarayana Tummala , Yong Zhang
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Technologies Corp.
- Current Assignee: KLA-Tencor Technologies Corp.
- Current Assignee Address: US CA Milpitas
- Agent Anne Marie Mewherter
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe are provided. One method includes separating defects into bins based on regions in which the defects are located, defect types, and values of the defects for parameter(s) of a detection algorithm. The method also includes determining a number of the defects to be selected from each bin by distributing a user-specified target number of defects across the bins. In addition, the method includes selecting defects from the bins based on the determined numbers thereby creating a defect sample for use in selecting values of parameter(s) of the detection algorithm for use in the inspection recipe.
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