Invention Grant
US08135488B2 Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
有权
用于定位装置的控制器，用于控制定位装置的方法，定位装置和设置有定位装置的光刻设备
- Patent Title: Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
- Patent Title (中): 用于定位装置的控制器，用于控制定位装置的方法，定位装置和设置有定位装置的光刻设备
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Application No.: US12331829Application Date: 2008-12-10
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Publication No.: US08135488B2Publication Date: 2012-03-13
- Inventor: Marcel François Heertjes , Wilhelmus Franciscus Johannes Simons , Dennis Andreas Petrus Hubertina Houben , Jeffrey Hendrikus Peter Maria Goossens
- Applicant: Marcel François Heertjes , Wilhelmus Franciscus Johannes Simons , Dennis Andreas Petrus Hubertina Houben , Jeffrey Hendrikus Peter Maria Goossens
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.
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