Invention Grant
- Patent Title: Pre-released structure device
- Patent Title (中): 预发布结构设备
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Application No.: US12338174Application Date: 2008-12-18
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Publication No.: US08138556B2Publication Date: 2012-03-20
- Inventor: Stéphane Caplet
- Applicant: Stéphane Caplet
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Pearne & Gordon LLP
- Priority: FR0760400 20071227
- Main IPC: H01L29/72
- IPC: H01L29/72
Abstract:
A pre-released structure device comprising: at least one first stacking, comprising at least one first layer based on at least one first material, arranged against a second stacking comprising at least one second layer based on at least one second material, at least one closed cavity, formed in the first and/or the second stacking, and arranged between a portion of the first stacking forming the pre-released structure and the second stacking, at least one spacer arranged in the cavity and linking the portion of the first stacking to the second stacking.
Public/Granted literature
- US20090261431A1 PRE-RELEASED STRUCTURE DEVICE Public/Granted day:2009-10-22
Information query
IPC分类:
