Invention Grant
- Patent Title: Micro-oscillating element and method of making the same
- Patent Title (中): 微振动元件及其制造方法
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Application No.: US12292540Application Date: 2008-11-20
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Publication No.: US08142670B2Publication Date: 2012-03-27
- Inventor: Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
- Applicant: Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2005-039162 20050216
- Main IPC: B44C1/22
- IPC: B44C1/22 ; C25F3/00

Abstract:
A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.
Public/Granted literature
- US20090107949A1 Micro-oscillating element and method of making the same Public/Granted day:2009-04-30
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