Invention Grant
- Patent Title: MEMS sensor with movable z-axis sensing element
- Patent Title (中): 具有可移动z轴传感元件的MEMS传感器
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Application No.: US12205241Application Date: 2008-09-05
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Publication No.: US08146425B2Publication Date: 2012-04-03
- Inventor: Xin Zhang , Michael W. Judy
- Applicant: Xin Zhang , Michael W. Judy
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: G01P15/125
- IPC: G01P15/125
Abstract:
A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure positioned radially outward from the MEMS structure. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.
Public/Granted literature
- US20100058865A1 MEMS Sensor with Movable Z-Axis Sensing Element Public/Granted day:2010-03-11
Information query
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