Invention Grant
- Patent Title: Sensor system and method for manufacturing a sensor system
- Patent Title (中): 用于制造传感器系统的传感器系统和方法
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Application No.: US12887200Application Date: 2010-09-21
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Publication No.: US08146439B2Publication Date: 2012-04-03
- Inventor: Marcus Ahles , Hubert Benzel
- Applicant: Marcus Ahles , Hubert Benzel
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009045158 20090930
- Main IPC: G01L9/00
- IPC: G01L9/00 ; H05K3/00
Abstract:
A sensor system, in particular a pressure sensor system, having a substrate having a main extension plane, the substrate having at least one trench on a first side, and the trench being provided to produce a diaphragm area on a second side of the substrate diametrically opposite to the first side perpendicularly to the main extension plane, and a decoupling element further being integrated in the material of the diaphragm area.
Public/Granted literature
- US20110072906A1 SENSOR SYSTEM AND METHOD FOR MANUFACTURING A SENSOR SYSTEM Public/Granted day:2011-03-31
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