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US08146443B2 Rotating body dynamic quantity measuring device and system 有权
旋转体动力测量装置及系统

Rotating body dynamic quantity measuring device and system
Abstract:
A single crystal semiconductor including a Wheatstone bridge circuit formed of an impurity diffusion layer whose longitudinal direction is aligned with a particular crystal orientation is connected to a rotating body. A rotating body dynamic quantity measuring device and a system using the measuring device are fatigue- and corrosion-resistant because of the single crystal semiconductor used and are not easily affected by temperature variations because of the bridge circuit considering a single crystal anisotropy.
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