Invention Grant
- Patent Title: Method for slicing workpiece
- Patent Title (中): 切割工件的方法
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Application No.: US12990985Application Date: 2009-06-04
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Publication No.: US08146581B2Publication Date: 2012-04-03
- Inventor: Koji Kitagawa , Kazuya Tomii
- Applicant: Koji Kitagawa , Kazuya Tomii
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Handotai Co., Ltd.
- Current Assignee: Shin-Etsu Handotai Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2008-171057 20080630
- International Application: PCT/JP2009/002516 WO 20090604
- International Announcement: WO2010/001529 WO 20100107
- Main IPC: B28D1/08
- IPC: B28D1/08

Abstract:
The present invention is a method for slicing a workpiece into wafers by pressing a cylindrical workpiece held with a workpiece holder against a wire row formed by a wire spirally wound between a plurality of wire guides and making the wire travel while supplying a slurry to a contact portion between the workpiece and the wire, wherein the workpiece is sliced with an axis direction of the workpiece inclined with respect to a plane formed by the wire row, after the workpiece is inclined in such a manner that a side far from the wire row plane is a side where the wire guides are to be axially expanded. As a result, there is provided a method for slicing that enable wafers having a good Warp shape to be obtained by precisely slicing a workpiece with a wire saw.
Public/Granted literature
- US20110059679A1 METHOD FOR SLICING WORKPIECE Public/Granted day:2011-03-10
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