Invention Grant
- Patent Title: Hybrid composite wafer carrier for wet clean equipment
- Patent Title (中): 用于湿式清洁设备的混合复合晶片载体
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Application No.: US11743516Application Date: 2007-05-02
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Publication No.: US08146902B2Publication Date: 2012-04-03
- Inventor: Wing Lau Cheng , Arnold Kholodenko
- Applicant: Wing Lau Cheng , Helen Cheng, legal representative , Arnold Kholodenko
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: B23Q3/00
- IPC: B23Q3/00

Abstract:
A carrier structure for supporting a substrate when being processed by passing the carrier through a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening, the opening being slightly larger than the substrate such that a gap exists between the substrate and the opening. The frame comprises a composite core, a top sheet, a bottom sheet, a layer of aramid fabric between the top sheet and the core and a second layer of aramid fabric between the bottom sheet and the core. The top sheet and the bottom sheet being formed from a polymer material. A method of manufacture is also described.
Public/Granted literature
- US20080152922A1 HYBRID COMPOSITE WAFER CARRIER FOR WET CLEAN EQUIPMENT Public/Granted day:2008-06-26
Information query
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