Invention Grant
- Patent Title: Piezoelectric element and method for manufacturing the same, liquid-ejecting head and method for manufacturing the same, and liquid-ejecting apparatus
- Patent Title (中): 压电元件及其制造方法，液体喷射头及其制造方法和液体喷射装置
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Application No.: US12611823Application Date: 2009-11-03
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Publication No.: US08147041B2Publication Date: 2012-04-03
- Inventor: Akira Kuriki , Koji Sumi , Tatsuo Sawasaki , Tatsuro Torimoto , Motoki Takabe
- Applicant: Akira Kuriki , Koji Sumi , Tatsuo Sawasaki , Tatsuro Torimoto , Motoki Takabe
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: JP2008-283372 20081104; JP2009-214140 20090916
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/00 ; H02N2/00
Abstract:
A piezoelectric element includes a piezoelectric film containing lead (Pb), zirconium (Zr), and titanium (Ti). The piezoelectric film has a composition satisfying the relationship of Zr/(Ti+Zr)>Ti/(Ti+Zr) and has a polarization-electric field hysteresis loop having a Pm/2Pr of 1.95 or more and a Vc(−) of −1.75 V or more, wherein Pm denotes saturation polarization, Pr denotes remanent polarization, and Vc(−) denotes a negative coercive electric field intensity.
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