Invention Grant
US08147136B2 Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device
有权
具有温度稳定性的微机械装置以及用于在微机械装置上调整限定温度或限定温度过程的方法
- Patent Title: Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device
- Patent Title (中): 具有温度稳定性的微机械装置以及用于在微机械装置上调整限定温度或限定温度过程的方法
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Application No.: US12058872Application Date: 2008-03-31
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Publication No.: US08147136B2Publication Date: 2012-04-03
- Inventor: Jörg Heber , Thomas Klose , Thilo Sandner , Andreas Bergmann , Christian Gerwig , Thomas Knieling
- Applicant: Jörg Heber , Thomas Klose , Thilo Sandner , Andreas Bergmann , Christian Gerwig , Thomas Knieling
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Keating & Bennett, LLP
- Priority: DE102007015719 20070402; DE102008013098 20080307
- Main IPC: G01K1/16
- IPC: G01K1/16 ; G01K11/26 ; G01K3/04 ; G01K3/06 ; G01J5/08
Abstract:
A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.
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