Invention Grant
US08147221B2 Electromagnetic micro-pump 有权
电磁微泵

Electromagnetic micro-pump
Abstract:
An electromagnetic micro-pump includes a substrate, a top plate, a magnetic diaphragm, and a coil unit. The substrate includes a first face and a second face. The first face includes a groove. The top plate is mounted on the first face of the substrate. The top plate includes an input hole, an output hole, and a through-hole. Each of the input hole, the output hole, and the through-hole extends through the top plate and is in communication with the groove. The through-hole is between the input hole and the output hole. The magnetic diaphragm is elastically deformable and mounted to an outer face of the top plate to seal the through-hole. The coil unit is mounted to the second face of the substrate and aligned with the through-hole.
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