Invention Grant
- Patent Title: Vacuum divider for differential pumping of a vacuum system
- Patent Title (中): 用于真空系统的差分抽吸的真空分配器
-
Application No.: US11749083Application Date: 2007-05-15
-
Publication No.: US08147222B2Publication Date: 2012-04-03
- Inventor: Alexander Mordehai , Mark Werlich
- Applicant: Alexander Mordehai , Mark Werlich
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: F04B35/04
- IPC: F04B35/04
Abstract:
A vacuum divider is positioned between rotor blades of a turbo-molecular pump and a vacuum manifold formed from multiple vacuum chambers. A first coupling aperture passes through the vacuum divider and allows gas to pass from a first of the multiple vacuum chambers to the turbo-molecular pump. A second coupling aperture passes through the vacuum divider and allows gas to pass from a second of the multiple vacuum chambers to the turbo-molecular pump.
Public/Granted literature
- US20080283125A1 Vacuum Divider for Differential Pumping of a Vacuum System Public/Granted day:2008-11-20
Information query
