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US08147596B2 Hydrogen permeable film and method for manufacturing the same 有权
氢氧化膜及其制造方法

Hydrogen permeable film and method for manufacturing the same
Abstract:
A hydrogen-permeable film has a ceramic material of a nitride or oxide of a metal element belonging to group IVB, VB or VIB and hydrogen-permeable metal particles of at least one kind selected from palladium (Pd), niobium (Nb), vanadium (V), tantalum (Ta) and alloys thereof dispersed in the ceramic material. A ratio of the hydrogen-permeable metal particles in the hydrogen-permeable film is 20 to 70 mass %, and a thickness of the hydrogen-permeable film is 5 to 1,000 nm.
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