Invention Grant
- Patent Title: Method for fabricating probe needle tip of probe card
- Patent Title (中): 探针卡探针针尖的制作方法
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Application No.: US11989955Application Date: 2006-05-08
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Publication No.: US08148050B2Publication Date: 2012-04-03
- Inventor: Byung Ho Jo
- Applicant: Byung Ho Jo
- Applicant Address: KR Yongin-si, Gyeonggi-do KR Gunpo-si, Gyeonggi-do
- Assignee: Byung Ho Jo,Microfriend Inc.
- Current Assignee: Byung Ho Jo,Microfriend Inc.
- Current Assignee Address: KR Yongin-si, Gyeonggi-do KR Gunpo-si, Gyeonggi-do
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP.
- Priority: KR10-2005-0080868 20050831
- International Application: PCT/KR2006/001715 WO 20060508
- International Announcement: WO2007/026985 WO 20070308
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/26 ; G03F7/36 ; G03F7/40

Abstract:
Disclosed herein is a method for fabricating a probe needle tip of a probe card, in which, in order to prevent a poor grinding effect caused by irregular removal or flexibility of the photoresists laminated to be high in the course of polishing a first metal loaded into the opening of the photoresists laminated into a multilayer configuration upon formation of the probe needle tip of the probe card, a second metal is laminated on any one of one or more stacked photoresist layers, thus firmly holding the photoresist layers on/beneath the metal.
Public/Granted literature
- US20090155724A1 Method for fabricating probe needle tip of probe card Public/Granted day:2009-06-18
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