Invention Grant
US08148050B2 Method for fabricating probe needle tip of probe card 有权
探针卡探针针尖的制作方法

Method for fabricating probe needle tip of probe card
Abstract:
Disclosed herein is a method for fabricating a probe needle tip of a probe card, in which, in order to prevent a poor grinding effect caused by irregular removal or flexibility of the photoresists laminated to be high in the course of polishing a first metal loaded into the opening of the photoresists laminated into a multilayer configuration upon formation of the probe needle tip of the probe card, a second metal is laminated on any one of one or more stacked photoresist layers, thus firmly holding the photoresist layers on/beneath the metal.
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