Invention Grant
- Patent Title: Non-volatile memory and method of manufacturing the same
- Patent Title (中): 非易失性存储器及其制造方法
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Application No.: US12484273Application Date: 2009-06-15
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Publication No.: US08148215B2Publication Date: 2012-04-03
- Inventor: Kiyoshi Kato , Yoshiyuki Kurokawa
- Applicant: Kiyoshi Kato , Yoshiyuki Kurokawa
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Nixon Peabody LLP
- Agent Jeffrey L. Costellia
- Priority: JP2001-126660 20010424
- Main IPC: H01L21/84
- IPC: H01L21/84

Abstract:
A non-volatile memory in which a leak current from an electric charge accumulating layer to an active layer is reduced and a method of manufacturing the non-volatile memory are provided. In a non-volatile memory made from a semiconductor thin film that is formed on a substrate (101) having an insulating surface, active layer side ends (110) are tapered. This makes the thickness of a first insulating film (106), which is formed by a thermal oxidization process, at the active layer side ends (110) the same as the thickness of the rest of the first insulating film. Therefore local thinning of the first insulating film does not take place. Moreover, the tapered active layer side ends hardly tolerate electric field concentration at active layer side end corners (111). Accordingly, a leak current from an electric charge accumulating layer (107) to the active layer (105) is reduced to improve the electric charge holding characteristic. As a result, the first insulating film can be further made thin to obtain a high performance non-volatile memory that operates at a low voltage and consumes less power.
Public/Granted literature
- US20090269911A1 NON-VOLATILE MEMORY AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2009-10-29
Information query
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