Invention Grant
US08148243B2 Zero capacitor RAM with reliable drain voltage application and method for manufacturing the same 失效
零电容RAM具有可靠的漏极电压应用及其制造方法

  • Patent Title: Zero capacitor RAM with reliable drain voltage application and method for manufacturing the same
  • Patent Title (中): 零电容RAM具有可靠的漏极电压应用及其制造方法
  • Application No.: US12972998
    Application Date: 2010-12-20
  • Publication No.: US08148243B2
    Publication Date: 2012-04-03
  • Inventor: Eun Sung Lee
  • Applicant: Eun Sung Lee
  • Applicant Address: KR Kyoungki-do
  • Assignee: Hynix Semiconductor Inc.
  • Current Assignee: Hynix Semiconductor Inc.
  • Current Assignee Address: KR Kyoungki-do
  • Agency: Ladas & Parry LLP
  • Priority: KR10-2007-0117207 20071116
  • Main IPC: H01L21/36
  • IPC: H01L21/36
Zero capacitor RAM with reliable drain voltage application and method for manufacturing the same
Abstract:
The following discloses and describes a zero capacitor RAM as well as a method for manufacturing the same. The zero capacitor RAM includes an SOI substrate. This SOI substrate is composed of a stacked structure of a silicon substrate, an embedded insulation film and a silicon layer. This layer is patterned into line types to constitute active patterns. Moreover, a first insulation layer forms between the active patterns and gates form on the active patterns as well as the first insulation layer to extend perpendicularly to the active patterns. In addition, a source forms in the active pattern on one side of each gate, a drain forms in the active pattern on the other side of each gate which is achieved by filling a metal layer. Continuing, a contact plug forms between the gates on the source and an interlayer dielectric forms on the contact plug in addition to the gates Finally, a bit line forms on the interlayer dielectric to extend perpendicularly to the gates and come into contact with the drain.
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