Invention Grant
- Patent Title: Semiconductor memory device and method of forming the same
- Patent Title (中): 半导体存储器件及其形成方法
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Application No.: US12232962Application Date: 2008-09-26
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Publication No.: US08148260B2Publication Date: 2012-04-03
- Inventor: Kyoung-Sub Shin
- Applicant: Kyoung-Sub Shin
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2007-099409 20071002
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
Provided may be a semiconductor memory device and a method of forming the semiconductor memory device. The memory device of example embodiments may include a bit line structure including a bit line on a semiconductor substrate, and a buried contact plug structure including a buried contact pad and a buried contact plug that extends in a lower portion of the bit line from one side of the bit line and connected to the buried contact pad. A width of the buried contact plug near a top surface of the buried contact pad may be greater than a width of the buried contact plug adjacent to the bit line.
Public/Granted literature
- US20090085083A1 Semiconductor memory device and method of forming the same Public/Granted day:2009-04-02
Information query
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