Invention Grant
US08148705B2 Method and apparatus for inspecting defects of patterns formed on a hard disk medium
有权
用于检查形成在硬盘介质上的图案的缺陷的方法和装置
- Patent Title: Method and apparatus for inspecting defects of patterns formed on a hard disk medium
- Patent Title (中): 用于检查形成在硬盘介质上的图案的缺陷的方法和装置
-
Application No.: US12314938Application Date: 2008-12-19
-
Publication No.: US08148705B2Publication Date: 2012-04-03
- Inventor: Takenori Hirose , Masahiro Watanabe , Yasuhiro Yoshitake
- Applicant: Takenori Hirose , Masahiro Watanabe , Yasuhiro Yoshitake
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2007-330482 20071221
- Main IPC: G01N21/86
- IPC: G01N21/86 ; G01V8/00

Abstract:
If an inspection method for inspecting a patterned medium is intended for the nanoimprint process control, it is necessary to measure a correct shape of each pattern element. On the other hand, if the inspection method is intended for the quality control of products, it is necessary to inspect the products on a I00 percent basis. However, the conventional method which uses SEM or AFM could not satisfy these requirements. According to the present invention, IO0-percent inspection of products becomes possible by a method including the steps of: irradiating a surface of a hard disk medium, on which a magnetic material pattern is formed, with a light beam including a plurality of wavelengths; detecting the intensity of a reflected light beam from the hard disk medium on a wavelength basis; calculating a spectral reflectance from the detected intensity of the reflected light beam; and detecting a shape of each pattern element formed on the hard disk medium on the basis of the calculated spectral reflectance.
Public/Granted literature
- US20090161244A1 Method and apparatus for inspecting defects of patterns formed on a hard disk medium Public/Granted day:2009-06-25
Information query