Invention Grant
US08148716B2 Group III nitride semiconductor optical device, epitaxial substrate, and method of making group III nitride semiconductor light-emitting device
有权
III族氮化物半导体光学器件,外延衬底,以及制造III族氮化物半导体发光器件的方法
- Patent Title: Group III nitride semiconductor optical device, epitaxial substrate, and method of making group III nitride semiconductor light-emitting device
- Patent Title (中): III族氮化物半导体光学器件,外延衬底,以及制造III族氮化物半导体发光器件的方法
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Application No.: US12837904Application Date: 2010-07-16
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Publication No.: US08148716B2Publication Date: 2012-04-03
- Inventor: Masaki Ueno , Yohei Enya , Takashi Kyono , Yusuke Yoshizumi
- Applicant: Masaki Ueno , Yohei Enya , Takashi Kyono , Yusuke Yoshizumi
- Applicant Address: JP Osaka-shi
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Venable LLP
- Agent Michael A. Sartori
- Priority: JP2009-228887 20090930
- Main IPC: H01L33/02
- IPC: H01L33/02

Abstract:
A group III nitride semiconductor optical device includes: a substrate comprising a group III nitride semiconductor; a first group-III nitride semiconductor region on a primary surface of the substrate; a second group-III nitride semiconductor region on the primary surface of the substrate; and an active layer between the first group-III nitride semiconductor region and the second group-III nitride semiconductor region. The primary surface of the substrate tilts at a tilt angle in the range of 63 degrees to smaller than 80 degrees toward the m-axis of the group III nitride semiconductor from a plane perpendicular to a reference axis extending along the c-axis of the group III nitride semiconductor. The first group-III nitride semiconductor region, the active layer, and the second group-III nitride semiconductor region are arranged in the direction of the normal axis to the primary surface of the substrate. The active layer is configured to produce light having a wavelength in the range of 580 nm to 800 nm. The active layer includes an epitaxial semiconductor layer comprising a gallium nitride based semiconductor containing indium as a group III element. The epitaxial semiconductor layer has an indium content ranging from 0.35 to 0.65. The c-axis of the gallium nitride based semiconductor tilts from the normal axis. The reference axis is oriented in the direction of either the axis [0001] or [000−1] of the group III nitride semiconductor.
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