Invention Grant
- Patent Title: Bottom gate type thin film transistor, method of manufacturing the same, and display apparatus
- Patent Title (中): 底栅型薄膜晶体管,其制造方法以及显示装置
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Application No.: US12515268Application Date: 2007-11-20
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Publication No.: US08148721B2Publication Date: 2012-04-03
- Inventor: Ryo Hayashi , Nobuyuki Kaji , Hisato Yabuta
- Applicant: Ryo Hayashi , Nobuyuki Kaji , Hisato Yabuta
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2006-328308 20061205; JP2007-273863 20071022
- International Application: PCT/JP2007/072878 WO 20071120
- International Announcement: WO2008/069056 WO 20080612
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L29/786 ; H01L21/336

Abstract:
Provided is a bottom gate type thin film transistor including on a substrate (1) a gate electrode (2), a first insulating film (3) as a gate insulating film, an oxide semiconductor layer (4) as a channel layer, a second insulating film (5) as a protective layer, a source electrode (6), and a drain electrode (7), in which the oxide semiconductor layer (4) includes an oxide including at least one selected from the group consisting of In, Zn, and Sn, and the second insulating film (5) includes an amorphous oxide insulator formed so as to be in contact with the oxide semiconductor layer (4) and contains therein 3.8×1019 molecules/cm3 or more of a desorbed gas observed as oxygen by temperature programmed desorption mass spectrometry.
Public/Granted literature
- US20100051936A1 BOTTOM GATE TYPE THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE SAME, AND DISPLAY APPARATUS Public/Granted day:2010-03-04
Information query
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