Invention Grant
- Patent Title: High voltage semiconductor device with JFET regions containing dielectrically isolated junctions and method of fabricating the same
- Patent Title (中): 具有包含介电隔离结的JFET区域的高电压半导体器件及其制造方法
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Application No.: US12928682Application Date: 2010-12-16
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Publication No.: US08148758B2Publication Date: 2012-04-03
- Inventor: Hamza Yilmaz
- Applicant: Hamza Yilmaz
- Applicant Address: US CA Sunnyvale
- Assignee: Alpha and Omega Semiconductor Inc.
- Current Assignee: Alpha and Omega Semiconductor Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Patentability Associates
- Main IPC: H01L29/72
- IPC: H01L29/72

Abstract:
A high-voltage field-effect device contains an extended drain or “drift” region including an embedded stack of JFET regions separated by intervening layers of the drift region. Each of the JFET regions is filled with material of an opposite conductivity type to that of the drift region, and the floor and ceiling of each JFET region is lined with an oxide layer. When the device is blocking a voltage in the off condition, the semiconductor material inside the JFET regions and in the drift region that separates the JFET regions is depleted. This improves the voltage-blocking ability of the device while conserving chip area. The oxide layer prevents dopant from the JFET regions from diffusing into the drift region.
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