Invention Grant
- Patent Title: Semiconductor memory devices including recess-type control gate electrodes and methods of fabricating the semiconductor memory devices
- Patent Title (中): 包括凹型控制栅电极的半导体存储器件和制造半导体存储器件的方法
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Application No.: US11709860Application Date: 2007-02-23
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Publication No.: US08148767B2Publication Date: 2012-04-03
- Inventor: Yoon-dong Park , June-mo Koo , Kyoung-lae Cho
- Applicant: Yoon-dong Park , June-mo Koo , Kyoung-lae Cho
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2006-0047528 20060526
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
A semiconductor memory device includes a semiconductor substrate, a control gate electrode recessed in the semiconductor substrate, a storage node layer interposed between a sidewall of the control gate electrode and the semiconductor substrate, a tunneling insulation layer interposed between the storage node layer and the semiconductor substrate, a blocking insulation layer interposed between the storage node layer and the control gate electrode, and first and second channel regions formed around a surface of the semiconductor substrate to at least partially surround the control gate electrode. The semiconductor memory device may include a plurality of control gate electrodes, storage node layers, tunneling insulation layers, blocking insulation layers, and continuous first and second channel regions. A method of fabricating the semiconductor memory device includes etching the semiconductor substrate to form a plurality of holes, forming the tunneling insulation layers, storage node layers, blocking insulation layers, and control gate electrodes.
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