Invention Grant
US08148789B2 Non-volatile semiconductor storage device and method of manufacturing the same 有权
非易失性半导体存储装置及其制造方法

Non-volatile semiconductor storage device and method of manufacturing the same
Abstract:
A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings includes: a first columnar semiconductor layer extending in a direction perpendicular to a substrate; a charge accumulation layer formed on the first columnar semiconductor layer via a first air gap and accumulating charges; a block insulation layer contacting the charge accumulation layer; and a plurality of first conductive layers contacting the block insulation layer.
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