Invention Grant
US08148809B2 Semiconductor device, method for manufacturing the same, and multilayer substrate having the same
有权
半导体装置及其制造方法以及具有该半导体装置的多层基板
- Patent Title: Semiconductor device, method for manufacturing the same, and multilayer substrate having the same
- Patent Title (中): 半导体装置及其制造方法以及具有该半导体装置的多层基板
-
Application No.: US12654707Application Date: 2009-12-29
-
Publication No.: US08148809B2Publication Date: 2012-04-03
- Inventor: Kouji Senda , Satoshi Shiraki , Yukihiro Maeda , Shinichi Hirose , Tetsuo Fujii , Takashi Nakano
- Applicant: Kouji Senda , Satoshi Shiraki , Yukihiro Maeda , Shinichi Hirose , Tetsuo Fujii , Takashi Nakano
- Applicant Address: JP Kariya
- Assignee: Denso Corporation
- Current Assignee: Denso Corporation
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2009-6982 20090115; JP2009-238483 20091015; JP2009-284343 20091215
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A method for manufacturing a semiconductor device includes: preparing a wafer formed of a SOI substrate; forming a circuit portion in a principal surface portion; removing a support substrate of the SOI substrate; fixing an insulation member on a backside of a semiconductor layer so as to be opposite to the circuit portion; dicing the wafer and dividing the wafer into multiple chips; arranging a first conductive member on the insulation member so as to be opposite to a part of the low potential reference circuit, and arranging a second conductive member on the insulation member so as to be opposite to a part of the high potential reference circuit; and coupling the first conductive member with a first part of the low potential reference circuit, and coupling the second conductive member with a second part of the high potential reference circuit.
Public/Granted literature
- US20100176480A1 Semiconductor device, method for manufacturing the same, and multilayer substrate having the same Public/Granted day:2010-07-15
Information query
IPC分类: