Invention Grant
US08148809B2 Semiconductor device, method for manufacturing the same, and multilayer substrate having the same 有权
半导体装置及其制造方法以及具有该半导体装置的多层基板

Semiconductor device, method for manufacturing the same, and multilayer substrate having the same
Abstract:
A method for manufacturing a semiconductor device includes: preparing a wafer formed of a SOI substrate; forming a circuit portion in a principal surface portion; removing a support substrate of the SOI substrate; fixing an insulation member on a backside of a semiconductor layer so as to be opposite to the circuit portion; dicing the wafer and dividing the wafer into multiple chips; arranging a first conductive member on the insulation member so as to be opposite to a part of the low potential reference circuit, and arranging a second conductive member on the insulation member so as to be opposite to a part of the high potential reference circuit; and coupling the first conductive member with a first part of the low potential reference circuit, and coupling the second conductive member with a second part of the high potential reference circuit.
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