Invention Grant
- Patent Title: Formed product of line-structured substance composed of carbon element, and method of forming the same
- Patent Title (中): 由碳元素构成的线状结构物的成型体及其形成方法
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Application No.: US11024756Application Date: 2004-12-30
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Publication No.: US08148820B2Publication Date: 2012-04-03
- Inventor: Shintaro Sato
- Applicant: Shintaro Sato
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2004-252751 20040831
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40
Abstract:
The present invention proposes a method of readily and reliably forming CNTs independent of a substrate allowing a catalyst metal to deposit thereon, or an underlying material, even for the case where the substrate is not used, in which a titanium-cobalt composite particles are deposited, using a catalyst particle production system, on an insulating film formed on a silicon substrate, and CNTs are grown from the from titanium-cobalt composite particles by the CVD process.
Public/Granted literature
- US20060045836A1 Formed product of line-structured substance composed of carbon element, and method of forming the same Public/Granted day:2006-03-02
Information query
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