Invention Grant
- Patent Title: Bonding pad on IC substrate and method for making the same
- Patent Title (中): IC基板上的接合垫及其制造方法
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Application No.: US11383762Application Date: 2006-05-17
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Publication No.: US08148822B2Publication Date: 2012-04-03
- Inventor: Mou-Shiung Lin , Hsin-Jung Lo , Chiu-Ming Chou , Chien-Kang Chou , Ke-Hung Chen
- Applicant: Mou-Shiung Lin , Hsin-Jung Lo , Chiu-Ming Chou , Chien-Kang Chou , Ke-Hung Chen
- Applicant Address: TW Hsinchu
- Assignee: Megica Corporation
- Current Assignee: Megica Corporation
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L21/44

Abstract:
A bonding pad structure is fabricated on an integrated circuit (IC) substrate having at least a contact layer on its top surface. A passivation layer covers the top surface of the IC substrate and the contact layer. The passivation layer has an opening exposing a portion of the contact layer. An electrically conductive adhesion/barrier layer directly is bonded to the contact layer. The electrically conductive adhesion/barrier layer extends to a top surface of the passivation layer. A bonding metal layer is stacked on the electrically conductive adhesion/barrier layer.
Public/Granted literature
- US20070023919A1 BONDING PAD ON IC SUBSTRATE AND METHOD FOR MAKING THE SAME Public/Granted day:2007-02-01
Information query
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