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US08148931B2 Multi-degree-of-freedom stage control system 有权
多自由度舞台控制系统

Multi-degree-of-freedom stage control system
Abstract:
There are included a plurality of actuators, an instruction generator for generating instructions of plural degrees of freedom, a position arithmetic unit for calculating positions of plural degrees of freedom from signals of a plurality of sensors, a control arithmetic unit for calculating operation amounts of plural degrees of freedom from the instructions of plural degrees of freedom and the positions of plural degrees of freedom, a thrust force conversion arithmetic unit for calculating thrust force instructions of the plurality of actuators from the operation amounts of the plural degrees of freedom, a current instruction unit for calculating current instructions which should be flowed to the plurality of actuators, and a sensor configuration input device for selecting a desired sensor configuration from among a plurality of sensor configurations. The positions of plural degrees of freedom are calculated by using a position arithmetic expression corresponding to a selected sensor configuration.
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