Invention Grant
- Patent Title: Probe card
- Patent Title (中): 探针卡
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Application No.: US12086008Application Date: 2006-12-04
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Publication No.: US08149006B2Publication Date: 2012-04-03
- Inventor: Hiroshi Nakayama , Mitsuhiro Nagaya , Yoshio Yamada
- Applicant: Hiroshi Nakayama , Mitsuhiro Nagaya , Yoshio Yamada
- Applicant Address: JP Yokohama-shi
- Assignee: NHK Spring Co., Ltd.
- Current Assignee: NHK Spring Co., Ltd.
- Current Assignee Address: JP Yokohama-shi
- Agency: Edwards Wildman Palmer LLP
- Priority: JP2005-351305 20051205
- International Application: PCT/JP2006/324184 WO 20061204
- International Announcement: WO2007/066623 WO 20070614
- Main IPC: G01R31/20
- IPC: G01R31/20

Abstract:
A probe card includes probes that come into contact with a semiconductor wafer to receive or output an electric signal; a probe head that holds the probes; a substrate that has a wiring pattern corresponding to a circuit structure for generating a signal for a test; a reinforcing member that reinforces the substrate; an interposer that is stacked on the substrate and includes a housing having connection terminals resilient in an axial direction thereof and hole portions each housing one of the connection terminals; and a space transformer that is stacked between the interposer and the probe head and transforms intervals among the wires.
Public/Granted literature
- US20100052707A1 Probe Card Public/Granted day:2010-03-04
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