Invention Grant
US08149545B1 Low profile load beam with etched cavity for PZT microactuator 有权
PZT微致动器具有蚀刻腔的低轮廓负载梁

Low profile load beam with etched cavity for PZT microactuator
Abstract:
A dual-stage actuator disk drive suspension load beam has a recessed cavity formed in it into which the microactuator motor is partially or completely placed. The cavity may be formed by partially etching the load beam during the same etching process that creates the load beam from a sheet of stainless steel material. The partially etched load beam having a cavity for the microactuator motor has the advantages of a lower profile, improved inertial balancing of the suspension, and increased sway resonant frequency.
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