Invention Grant
US08150228B2 Acid block for hybrid silicon device processing compatible with low-loss waveguides
有权
用于与低损耗波导兼容的混合硅器件处理的酸性块
- Patent Title: Acid block for hybrid silicon device processing compatible with low-loss waveguides
- Patent Title (中): 用于与低损耗波导兼容的混合硅器件处理的酸性块
-
Application No.: US12346779Application Date: 2008-12-30
-
Publication No.: US08150228B2Publication Date: 2012-04-03
- Inventor: Richard Jones , Alexander W. Fang
- Applicant: Richard Jones , Alexander W. Fang
- Agency: Cool Patent, P.C.
- Agent Joseph P. Curtin
- Main IPC: G02B6/10
- IPC: G02B6/10 ; G02B6/00
Abstract:
An acid-stop structure for a rib waveguide comprises a fin structure formed between the sidewalls in each rib channel of the rib waveguide, thereby preventing acids and other etchants from flowing down the rib channel and under a die that has been bonded to a wafer.
Public/Granted literature
- US20100166360A1 ACID BLOCK FOR HYBRID SILICON DEVICE PROCESSING COMPATIBLE WITH LOW-LOSS WAVEGUIDES Public/Granted day:2010-07-01
Information query
