Invention Grant
US08150541B2 Methods and apparatus to modify a recipe process flow associated with a process control system during recipe execution 有权
在配方执行期间修改与过程控制系统相关联的配方过程流程的方法和设备

Methods and apparatus to modify a recipe process flow associated with a process control system during recipe execution
Abstract:
Example methods and apparatus to modify a recipe process flow during recipe execution are disclosed. A disclosed example method involves executing a recipe, and before completion of execution of the recipe, receiving process flow change information indicative of a modification to a process flow of the recipe. Process flow rules are then retrieved from a process flow rules data structure. The recipe process flow is modified based on the process flow change information in response to determining that at least one requested change indicated by the process flow change information does not violate one of the process flow rules.
Information query
Patent Agency Ranking
0/0