Invention Grant
- Patent Title: Control system and method for controlled object in time variant system with dead time, such as single crystal production device by czochralski method
- Patent Title (中): 时变系统中受控对象的控制系统和方法,如单晶生产装置,采用切克劳斯基法
-
Application No.: US11989749Application Date: 2006-06-07
-
Publication No.: US08150784B2Publication Date: 2012-04-03
- Inventor: Kenichi Bandoh , Shigeo Morimoto , Takuji Okumura , Tetsu Nagata , Masaru Shimada , Junsuke Tomioka , Yutaka Shiraishi , Takeshi Kodama
- Applicant: Kenichi Bandoh , Shigeo Morimoto , Takuji Okumura , Tetsu Nagata , Masaru Shimada , Junsuke Tomioka , Yutaka Shiraishi , Takeshi Kodama
- Applicant Address: JP Tokyo
- Assignee: Sumco Techxiv Corporation
- Current Assignee: Sumco Techxiv Corporation
- Current Assignee Address: JP Tokyo
- Agency: Posz Law Group, PLC
- Priority: JP2005-234221 20050812; JP2005-234240 20050812; JP2005-234284 20050812
- International Application: PCT/JP2006/311395 WO 20060607
- International Announcement: WO2007/020744 WO 20070222
- Main IPC: G06E1/00
- IPC: G06E1/00 ; G06E3/00 ; G06F15/18 ; G06G7/00

Abstract:
A device controls an object in a time variant system with a dead time such as a Czochralski method single crystal production device (CZ equipment). The dead time, time constant, and process gain value of an object (CZ equipment) are set. The process gain preset value has time variant characteristics. An output value and its first-order and second-order time differentiated values serve as the state variable. A nonlinear state predicting unit predicts a state variable value at a future time, based upon the current output value, dead time, time constant, and process gain preset value. A gain scheduled sliding mode control unit performs a gain scheduled sliding mode control operation based upon the state variable value at the future time, an output deviation at the future time, the time constant, and the set value of the process gain at the future time, to determine the manipulated variable of the object.
Public/Granted literature
Information query