Invention Grant
- Patent Title: Dynamic mode AFM apparatus
- Patent Title (中): 动态模式AFM装置
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Application No.: US12990070Application Date: 2009-04-08
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Publication No.: US08151368B2Publication Date: 2012-04-03
- Inventor: Hideki Kawakatsu , Dai Kobayashi
- Applicant: Hideki Kawakatsu , Dai Kobayashi
- Applicant Address: JP
- Assignee: Japan Science and Technology Agency
- Current Assignee: Japan Science and Technology Agency
- Current Assignee Address: JP
- Agency: Bacon and Thomas, PLLC
- Priority: JP2008-124891 20080512
- International Application: PCT/JP2009/057158 WO 20090408
- International Announcement: WO2009/139238 WO 20091119
- Main IPC: G01B5/28
- IPC: G01B5/28

Abstract:
A dynamic mode AFM apparatus for allowing high-speed identification of atoms of a sample surface, which comprises a scanner for performing three-dimensional scanning; an AC signal of a resonance frequency in a mode with flexural vibration of a cantilever; an AC signal of a second frequency which is lower than the frequency of the flexural vibration; a probe-sample distance modulated with the second frequency; a detector for detecting fluctuation of the resonance frequency; a detector for detecting vibration of the cantilever; and a detector for detecting a fluctuation component which is contained in a detected signal by detecting the resonance frequency fluctuation and synchronized with a modulation signal of the probe-sample distance, wherein an inclination of the resonance frequency against the probe-sample distance is obtained from the strength and polarity of the fluctuation component.
Public/Granted literature
- US20110055983A1 DYNAMIC MODE AFM APPARATUS Public/Granted day:2011-03-03
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