Invention Grant
- Patent Title: Ultra-miniature fiber-optic pressure sensor system and method of fabrication
- Patent Title (中): 超微型光纤压力传感器系统及其制造方法
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Application No.: US12849436Application Date: 2010-08-03
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Publication No.: US08151648B2Publication Date: 2012-04-10
- Inventor: Miao Yu , Hyungdae Bae , Xuming Zhang
- Applicant: Miao Yu , Hyungdae Bae , Xuming Zhang
- Applicant Address: US MD College Park
- Assignee: University of Maryland
- Current Assignee: University of Maryland
- Current Assignee Address: US MD College Park
- Agency: Rosenberg, Klein & Lee
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G02B6/00

Abstract:
Ultra-miniature surface-mountable Fabry-Perot pressure sensor is constructed on an optical fiber which utilizes a 45° angled fiber tip covered with a reflective layer which steers the optical axis of the fiber by 90°. The Fabry-Perot cavity is formed on the sidewall of the fiber and a polymer-metal composite diaphragm is formed on the top of the Fabry-Perot cavity to operate as a pressure transducer. The sensor exhibits a sufficient linearity over the broad pressure range with a high sensitivity. The sensitivity of the sensor may be tuned by controlling the thickness of the diaphragm. The sensor may be used in a wide range of applications, including reliable in vivo low invasive pressure measurements of biological fluids, single sensor systems, as well as integral spatial-division-multiplexing sensor networks. Methods of batch production of uniform device-to-device Fabry-Perot pressure sensors of co-axial and cross-axial configurations are presented.
Public/Granted literature
- US20110023617A1 ULTRA-MINIATURE FIBER-OPTIC PRESSURE SENSOR SYSTEM AND METHOD OF FABRICATION Public/Granted day:2011-02-03
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