Invention Grant
US08152598B2 Substrate treating method and substrate treating apparatus 有权
基板处理方法和基板处理装置

Substrate treating method and substrate treating apparatus
Abstract:
A substrate treating method includes rotating a substrate in a circumferential direction and polishing a peripheral portion of the substrate by pressing a polishing member to it using a pressing mechanism having a pressing pad. An angle of at least a part of the pressing pad with respect to an axial direction, in which the pressing mechanism makes the pressing pad press the peripheral portion of the substrate, is changed by an angle displacement mechanism which actively displaces the angle so that the polishing is performed depending on a surface to be polished in the peripheral portion.
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