Invention Grant
- Patent Title: CVD reactor comprising a gas inlet member
- Patent Title (中): CVD反应器包括气体入口构件
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Application No.: US12094972Application Date: 2006-11-11
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Publication No.: US08152924B2Publication Date: 2012-04-10
- Inventor: Martin Dauelsberg , Johannes Käppeler , Conor Martin
- Applicant: Martin Dauelsberg , Johannes Käppeler , Conor Martin
- Applicant Address: US CA Sunnyvale
- Assignee: Aixtron Inc.
- Current Assignee: Aixtron Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: SNR Denton US LLP
- Priority: DE102005056320 20051125
- International Application: PCT/EP2006/068716 WO 20061111
- International Announcement: WO2007/060161 WO 20070531
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/458 ; C23F16/00 ; H01L21/306 ; C23C16/06 ; C23C16/22

Abstract:
The invention relates to a device for depositing at least one layer on a substrate by means of a process gas which is introduced through a flow channel (4), extending in a vertical direction, of a gas inlet member (3), fixed in place with respect to a reactor housing, into a process chamber (1), extending in a horizontal direction, wherein the process gas leaves a gas outlet opening of a portion of the gas inlet member (3), protruding into the center of the rotationally symmetrical process chamber (1), and flows in a radially outward direction via a base (8′) of the process chamber (1), extending in a horizontal direction and rotating about the center, on which base the substrate lies. In order to improve the gas flow directly above the base of the process chamber, it is proposed that the front (3′) of the gas inlet member (3) protrudes into a pot-like recess (23) and an end portion (6′) of a gas deflecting face (6) is flush with the base (8′).
Public/Granted literature
- US20080308040A1 Cvd Reactor Comprising a Gas Inlet Member Public/Granted day:2008-12-18
Information query
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