Invention Grant
- Patent Title: Wide-angle highly reflective mirrors at 193NM
- Patent Title (中): 广角高反射镜193NM
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Application No.: US12393287Application Date: 2009-02-26
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Publication No.: US08153241B2Publication Date: 2012-04-10
- Inventor: Horst Schreiber , Charlene Marie Smith , Jue Wang
- Applicant: Horst Schreiber , Charlene Marie Smith , Jue Wang
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Walter M. Douglas
- Main IPC: G02B1/08
- IPC: G02B1/08 ; B32B15/00

Abstract:
The invention is directed to highly reflective optical elements having an amorphous MgAl2O4−SiO2 coating with fluoride enhancements inserted and sealed by dense smooth SiO2 layers, and to a method for preparing such elements using energetic deposition techniques and the spinel crystalline form of MgAl2O4 as the source of the amorphous MgAl2O4 coating, The coating and the method described herein can be used to make highly reflective mirrors, and can also be applied to beamsplitters, prisms, lenses, output couplers and similar elements used in
Public/Granted literature
- US20100215932A1 WIDE-ANGLE HIGHLY REFLECTIVE MIRRORS AT 193NM Public/Granted day:2010-08-26
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