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US08153335B2 Lithography masks, systems, and manufacturing methods 有权
光刻面具,系统和制造方法

Lithography masks, systems, and manufacturing methods
Abstract:
Lithography masks, lithography systems, methods of manufacturing lithography masks, methods of altering material layers of semiconductor devices, and methods of manufacturing semiconductor devices are disclosed. In one embodiment, a lithography mask includes a first pattern for at least one material layer of at least one die, the first pattern being oriented in a first position. The lithography mask includes a second pattern for at least one material layer of the at least one die, the second pattern being oriented in a second position. The second position is different than the first position.
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