Invention Grant
- Patent Title: Lithography masks, systems, and manufacturing methods
- Patent Title (中): 光刻面具,系统和制造方法
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Application No.: US12471695Application Date: 2009-05-26
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Publication No.: US08153335B2Publication Date: 2012-04-10
- Inventor: Uwe Paul Schroeder
- Applicant: Uwe Paul Schroeder
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater & Matsil, L.L.P.
- Main IPC: G03F1/00
- IPC: G03F1/00 ; G03C5/00

Abstract:
Lithography masks, lithography systems, methods of manufacturing lithography masks, methods of altering material layers of semiconductor devices, and methods of manufacturing semiconductor devices are disclosed. In one embodiment, a lithography mask includes a first pattern for at least one material layer of at least one die, the first pattern being oriented in a first position. The lithography mask includes a second pattern for at least one material layer of the at least one die, the second pattern being oriented in a second position. The second position is different than the first position.
Public/Granted literature
- US20100301457A1 Lithography Masks, Systems, and Manufacturing Methods Public/Granted day:2010-12-02
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