Invention Grant
- Patent Title: Ultra dark polymer
- Patent Title (中): 超暗聚合物
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Application No.: US12575670Application Date: 2009-10-08
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Publication No.: US08153353B2Publication Date: 2012-04-10
- Inventor: Jason Michael Neidrich
- Applicant: Jason Michael Neidrich
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Charles A. Brill; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: G03C1/835
- IPC: G03C1/835 ; H01L21/02 ; H01L21/70 ; H01L21/77 ; G02B26/00

Abstract:
A method and a material for creating an antireflective coating on an integrated circuit. A preferred embodiment comprises applying a dark polymer material on a reflective surface, curing the dark polymer material, and roughening a top surface of the dark polymer material. The roughening can be achieved by ashing the dark polymer material in an ash chamber. The dark polymer material, preferably a black matrix resin or a polyimide black matrix resin, when ashed in an oxygen rich atmosphere for a short period of time, forms a surface that is capable of absorbing light as well as randomly refracting light it does not absorb. A protective cap layer may be formed on top of the ashed dark polymer material to provide protection for the dark polymer material.
Public/Granted literature
- US20100025715A1 Ultra Dark Polymer Public/Granted day:2010-02-04
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