Invention Grant
- Patent Title: Photosensitive composition remover
- Patent Title (中): 感光组合物去除剂
-
Application No.: US10582787Application Date: 2004-12-14
-
Publication No.: US08153357B2Publication Date: 2012-04-10
- Inventor: Masato Kaneda , Yasuhiro Mikawa , Koji Shimizu , Kouichi Terao
- Applicant: Masato Kaneda , Yasuhiro Mikawa , Koji Shimizu , Kouichi Terao
- Applicant Address: JP Tokyo
- Assignee: Showa Denko K.K.
- Current Assignee: Showa Denko K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2003-418112 20031216
- International Application: PCT/JP2004/018973 WO 20041214
- International Announcement: WO2005/059646 WO 20050630
- Main IPC: G03F7/30
- IPC: G03F7/30 ; G03F7/32 ; C11D7/50

Abstract:
A photosensitive composition remover used for removal of an uncured photosensitive composition, which remover comprises 1 to 80 percent by mass of at least one type of aromatic hydrocarbon having 9 carbon atoms or more within the molecule. The photosensitive composition remover further comprises an aprotic polar solvent and/or another solvent other than aprotic polar solvents. The photosensitive composition remover is effective for removal of an uncured photosensitive composition film deposited at the periphery, edges, or back of a substrate or removal of an uncured photosensitive composition deposited at the surface of system members or equipment in a process for forming a photosensitive composition film on a glass substrate, a semiconductor wafer, or the like. It is preferably used for removal of a photosensitive composition containing a pigment.
Public/Granted literature
- US20070161530A1 Photosensitive composition remover Public/Granted day:2007-07-12
Information query
IPC分类: