Invention Grant
US08153967B2 Method of generating particle beam images using a particle beam apparatus 有权
使用粒子束装置产生粒子束图像的方法

Method of generating particle beam images using a particle beam apparatus
Abstract:
A representation of a particle beam image is generated by acquiring plural data sets using a particle beam apparatus. Each data set represents secondary particle intensities from a region of an object. The secondary particle intensities are acquired for the different data sets with different parameter adjustments of the particle beam apparatus. From the plural acquired data sets image data are generated using a tone-mapping method. The image data are represented at an output medium.
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