Invention Grant
- Patent Title: Method of generating particle beam images using a particle beam apparatus
- Patent Title (中): 使用粒子束装置产生粒子束图像的方法
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Application No.: US12542213Application Date: 2009-08-17
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Publication No.: US08153967B2Publication Date: 2012-04-10
- Inventor: Christian Hendrich
- Applicant: Christian Hendrich
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss NTS GmbH
- Current Assignee: Carl Zeiss NTS GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102008038216 20080818
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
A representation of a particle beam image is generated by acquiring plural data sets using a particle beam apparatus. Each data set represents secondary particle intensities from a region of an object. The secondary particle intensities are acquired for the different data sets with different parameter adjustments of the particle beam apparatus. From the plural acquired data sets image data are generated using a tone-mapping method. The image data are represented at an output medium.
Public/Granted literature
- US20100038534A1 METHOD OF GENERATING PARTICLE BEAM IMAGES USING A PARTICLE BEAM APPARATUS Public/Granted day:2010-02-18
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