Invention Grant
- Patent Title: Infrared sensor and manufacturing method thereof
- Patent Title (中): 红外线传感器及其制造方法
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Application No.: US12958556Application Date: 2010-12-02
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Publication No.: US08153976B2Publication Date: 2012-04-10
- Inventor: Tzong-Sheng Lee
- Applicant: Tzong-Sheng Lee
- Applicant Address: TW Hsinchu
- Assignee: Unimems Manufacturing Co., Ltd.
- Current Assignee: Unimems Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Nikolai & Mersereau, P.A.
- Agent C. G. Mersereau
- Priority: TW99129070A 20100830
- Main IPC: G01J5/00
- IPC: G01J5/00

Abstract:
A manufacturing method for an infrared sensor includes the following steps: providing a wafer having several chips and a substrate; forming four soldering portions, a thermistor, and an infrared sensing layer on the bottom surface of each chip, wherein the soldering portions are connected electrically to the thermistor and the infrared sensing layer; disposing a soldering material onto at least one bonding location for each soldering portion; backside-etching each chip of the wafer to form a sensing film and a surrounding wall around the sensing film; bonding the wafer and the substrate; heating the soldering materials to connect the substrate and each chip of the wafer; disposing an infrared filter on the surrounding wall of each chip; cutting the wafer and the substrate to form a plurality of individual infrared sensors. The instant disclosure further provides an associated infrared sensor.
Public/Granted literature
- US20120049066A1 INFRARED SENSOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-03-01
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