Invention Grant
- Patent Title: Automated calibration methodology for VUV metrology system
- Patent Title (中): VUV测量系统的自动校准方法
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Application No.: US12454837Application Date: 2009-05-22
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Publication No.: US08153987B2Publication Date: 2012-04-10
- Inventor: Jeffrey B. Hurst , Matthew Weldon , Phillip Walsh , Cristian Rivas , Dale A. Harrison
- Applicant: Jeffrey B. Hurst , Matthew Weldon , Phillip Walsh , Cristian Rivas , Dale A. Harrison
- Applicant Address: IL Migdal Ha'Emek
- Assignee: Jordan Valley Semiconductors Ltd.
- Current Assignee: Jordan Valley Semiconductors Ltd.
- Current Assignee Address: IL Migdal Ha'Emek
- Agency: D. Kligler IP Services Ltd.
- Main IPC: G12B13/00
- IPC: G12B13/00

Abstract:
A calibration pad having multiple calibration sites is provided. A particular calibration site may be utilized until that particular site has been determined to have become unacceptable for further use, for example from contamination, in which case the calibration processes may then move to use a different calibration site(s) on the calibration pad(s). A variety of techniques may be utilized to provide the determination that a site is no longer acceptable for use. Movement may thus occur over time from site to site for use in a calibration process. A variety of criteria may be established to determine when to move to another site. Though the designation of a site as “bad” may be based upon measured reflectance data, other criteria may also be used. For example, the number of times a site has been exposed to light may be the criteria for designating a site as bad. Alternatively the cumulative exposure of a site may be the criteria. Further, the plurality of calibration sites that are provided on the single calibration pad may be pre-evaluated so as to initially screen out unacceptable calibration sites prior to use. The techniques provided may be utilized in calibration processes which utilize a single calibration sample or processes which require a plurality of calibration samples.
Public/Granted literature
- US20100294922A1 Automated calibration methodology for VUV metrology system Public/Granted day:2010-11-25
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